Design and Fabrication of a Ring-Coupled Mach-Zehnder Interferometer Gyroscope

Eva Kempf , Pierre Labeye (1) , Philippe Grosse (2) , Frederic Boeuf (3) , Stephane Monfray (3) , Paul Charette (4, 5) , Regis Orobtchouk (6)

1 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
2 DOPT - Département d'Optronique
3 ST-CROLLES - STMicroelectronics [Crolles]
4 UdeS - Université de Sherbrooke
5 LN2 - Laboratoire Nanotechnologies et Nanosystèmes [Sherbrooke]
6 INL - I-Lum - INL - Ingénierie et conversion de lumière (i-Lum)

In this paper, we present a CMOScompatible integrated photonics resonant gyroscope incorporating active Si&Ge components with low-loss SiN waveguiding structures for the first time. The gyroscope design is based on a ring-coupled Mach-Zehnder interferometer (19.2 mm ring length). Based on numerical modelling, the estimated resolution is 1.08 deg/s, representing a 1.56-times improvement over a single ring all-pass design with the same footprint. Further improvement afforded by the MZI-based design is expected under Kerr effet limited conditions. Devices were fabricated with the STMicroelectronics DAPHNE (Datacom Advanced Photonics Nanoscale Environment) 300 mm Photonic R&D platform. Experimental measurements under static (nonrotating) conditions confirm the numerical modelling results.

Mots clés: Integrated gyroscope; resonant gyroscope; SiN waveguide; Mach-Zehnder Interferometer

Domaines: Sciences de l'information et de la communication; Sciences de l'ingénieur [physics]

Eva Kempf, Pierre Labeye, Philippe Grosse, Frederic Boeuf, Stephane Monfray, et al.. Design and Fabrication of a Ring-Coupled Mach-Zehnder Interferometer Gyroscope. ESSCIRC 2021 - IEEE 47th European Solid State Circuits Conference (ESSCIRC), Sep 2021, Grenoble, France. pp.179-182, ⟨10.1109/ESSCIRC53450.2021.9567877⟩. ⟨halshs-03515494⟩