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Optimisation des techniques de microfabrication sur diamant

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https://halshs.archives-ouvertes.fr/halshs-02329822
Contributor : Lya Fontaine <>
Submitted on : Wednesday, October 23, 2019 - 4:55:35 PM
Last modification on : Thursday, June 10, 2021 - 3:02:23 AM
Long-term archiving on: : Friday, January 24, 2020 - 8:21:21 PM

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  • HAL Id : halshs-02329822, version 1

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Lya Fontaine, Karine Isoird, Josiane Tasselli, Alain Cazarré, Patrick Austin, et al.. Optimisation des techniques de microfabrication sur diamant. Journées Nationales du Réseau Doctoral en Micro-nanoélectronique (JNRDM 2019), Jun 2019, Montpellier, France. pp.691 - 697. ⟨halshs-02329822⟩

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